| 摘要 |
PROBLEM TO BE SOLVED: To provide a means of vapor depositing an organic layer uniformly. SOLUTION: This is a method of coating a structural body by vaporizing an organic material filled in a long and narrow container having a wall. The coating method comprises a step in which a lid having opening parts is provided on the container; and by providing a baffle between the lid and the organic material, the vaporized organic material is prevented from passing through the opening part by directly gaining access to them without first hitting on the wall of the container; and by changing the size of the opening part or the interval between the adjoining opening parts, or by combining both, and by selecting change of the size of such opening part or change of the interval between the opening parts, the uniformity of the vapor flow rate of the organic material along the longitudinal direction of the vapor deposition source is improved in substance, and as a result, the vaporized organic material is prevented from directly gaining a line of sight access to the opening part by the baffle, thereby, a particle-shape organic material is prevented from passing through the opening parts. COPYRIGHT: (C)2004,JPO
|
