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发明名称
SEMICONDUCTOR CLEANING EQUIPMENT
摘要
申请公布号
KR20030081110(A)
申请公布日期
2003.10.17
申请号
KR20030022281
申请日期
2003.04.09
申请人
发明人
分类号
H01L21/304;B08B3/12
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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