| 摘要 |
A super resolution optical disk mother mold, having a substrate, a super resolution structure and a patterned photoresist layer. The super resolution is disposed between the substrate and the patterned photoresist layer. The super resolution optical disk mother mold is fabricated on the substrate prior to formation of the photoresist layer. The above process does not cause the problem of pre-exposing the photoresist layer. In addition, the surface roughness caused by thin-film particle will not occur to the optical disk mother mold fabricated by the above process. Therefore, the optical disk stamper made by the optical disk mother mold will not suffer from the problem of the surface roughness.
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