CATALYST-INDUCED GROWTH OF CARBON NANOTUBES ON TIPS OF CANTILEVERS AND NANOWIRES

摘要

A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scanning probe microscopy (AFM, EFM, etc.). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate; (2) catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips; (3) control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions; and (4) automation for mass production.