GRAVITY-FED IN-LINE CONTINUOUS PROCESSING SYSTEM AND METHOD

摘要

A gravity-few in-line continuous processing system (10) includes at least on e processing chamber (12) disposed between a first load lock (14) and a second load lock (16). The second load lock is disposed lower than the first load lock. A first device (18) isolates the processing chamber from the first loa d lock. A second device (20) isolates the processing chamber from the second load lock. There is at least one track (22) through the processing chamber a nd the first and second load locks. The track is structured and arranged such that an article (24) slides thereon under the force of gravity. The apparatu s also comprises an output tray (42), 4th device (20'), back of rotary barrel gate valves (60, 62, 64), 3rd devices (18'). The track is disposed at an ang le (26) to horizontal (19).