发明名称 |
Position sensor for ultraviolet and deep ultraviolet beams |
摘要 |
A position sensor for ultraviolet beams includes a beam positioning member for directing an ultraviolet beam along a path; a downconverter member for converting the beam to visible light; a position sensing member for sensing position of visible light thereon; and relay optics for directing the visible light to the position sensing member; wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.
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申请公布号 |
US2003193030(A1) |
申请公布日期 |
2003.10.16 |
申请号 |
US20020123491 |
申请日期 |
2002.04.15 |
申请人 |
FRICKE WILLIAM C.;GANOPOULOS MICHAEL |
发明人 |
FRICKE WILLIAM C.;GANOPOULOS MICHAEL |
分类号 |
G01J1/42;G01J1/58;G01S3/781;G01S3/783;(IPC1-7):G01J1/42 |
主分类号 |
G01J1/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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