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发明名称
Halbleitertestvorrichtung zum Messen des Versorgungsstromes einer Halbleitereinrichtung
摘要
申请公布号
DE19744651(C2)
申请公布日期
2003.10.16
申请号
DE19971044651
申请日期
1997.10.09
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO;YAMADA DEN-ON CO., LTD.
发明人
FUNAKURA, TERUHIKO;FUJITA, KAZUYA
分类号
G01R31/26;G01R19/00;G01R31/30;(IPC1-7):G01R31/28
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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