发明名称 Evaporation station for producing complex layers made from different materials and/or mixtures in a single evaporation process comprises a continuous evaporation device, and storage and feeding devices
摘要 Evaporation station comprises a continuous evaporation device consisting of at least one thermal evaporator (5) with supply devices (6), and storage and feeding devices (7) consisting of a material store (8) for storing the evaporation material and a drive and dosing unit (9, 10) for transporting the evaporation material and the supply lines. An independent claim is also included for a device for producing complex layers made from different materials and/or mixtures in a single evaporation process.
申请公布号 DE20220335(U1) 申请公布日期 2003.10.16
申请号 DE2002220335U 申请日期 2002.10.11
申请人 CREAVAC - CREATIVE VAKUUMBESCHICHTUNG GMBH 发明人
分类号 C23C14/24;(IPC1-7):C23C14/24 主分类号 C23C14/24
代理机构 代理人
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