发明名称 |
Evaporation station for producing complex layers made from different materials and/or mixtures in a single evaporation process comprises a continuous evaporation device, and storage and feeding devices |
摘要 |
Evaporation station comprises a continuous evaporation device consisting of at least one thermal evaporator (5) with supply devices (6), and storage and feeding devices (7) consisting of a material store (8) for storing the evaporation material and a drive and dosing unit (9, 10) for transporting the evaporation material and the supply lines. An independent claim is also included for a device for producing complex layers made from different materials and/or mixtures in a single evaporation process.
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申请公布号 |
DE20220335(U1) |
申请公布日期 |
2003.10.16 |
申请号 |
DE2002220335U |
申请日期 |
2002.10.11 |
申请人 |
CREAVAC - CREATIVE VAKUUMBESCHICHTUNG GMBH |
发明人 |
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分类号 |
C23C14/24;(IPC1-7):C23C14/24 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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