发明名称 |
METHOD OF FABRICATING VERTICAL ACTUATION COMB DRIVES |
摘要 |
A method of fabricating a vertical actuation comb drive first etches a cavity in a semiconductive wafer; then the comb structure is etched, and the fixed part of the structure is deformed by an induced strain, by techniques such as boron doping, by adding a metal layer or a fixed oxide, or a mechanical latch or an additional plate electrode. In a manner known in the art, application of a voltage across the fingers of the comb produces a deflection either tilting or a vertical movement in the moveable portion of the comb drive. |
申请公布号 |
WO03035542(A3) |
申请公布日期 |
2003.10.16 |
申请号 |
WO2002US34459 |
申请日期 |
2002.10.26 |
申请人 |
OPTICNET, INC. |
发明人 |
HOPKINS, DEAN, A., JR.;LIM, MARTIN;MAO, MINYAO |
分类号 |
B81B3/00;(IPC1-7):B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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