发明名称 SURFACE PLASMON ELEMENT, INSPECTION APPARATUS USING THE SAME AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a surface plasmon element, to provide an inspection apparatus using the surface plasmon element, and to provide a method of manufacturing the surface plasmon element. <P>SOLUTION: The surface plasmon element is provided with a light transmitting member 110 in which a space is installed at the inside, a revolving surface 112 which is contained in an inside wall 111 of the member 110 facing the space so as to revolve on the inside wall 111, and a metal film 120 formed on the revolving surface 112. Light which is incident on the member 110 from the outside so as to be guided to the revolving surface 112 excites a plasmon revolving on the surface of the metal film 120 along the revolving surface 112. The revolving surface plasmon interferes with the light guided to the revolving surface 112, and a state of the light reflected by the revolving surface 112 is changed according to a state of the revolving surface plasmon. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003294616(A) 申请公布日期 2003.10.15
申请号 JP20020098064 申请日期 2002.03.29
申请人 TOPPAN PRINTING CO LTD 发明人 NAKASO NOBUTAKA
分类号 C12M1/00;G01N21/03;G01N21/27;G01N21/41;(IPC1-7):G01N21/27 主分类号 C12M1/00
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