| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion conductive film which enables film formation and control of film thickness of the order of angstrom with the use of the chemical adsorption method, and accordingly has good transparency and is pinhole-free and, in addition, is firmly bonded to a substrate. SOLUTION: The ion conductive film has film-constituting molecules 2 coordinately bonded to the substrate through at least one atom to be selected from Si, Ge, Sn, Ti, Zr, S, and C directly or indirectly through an inner layer film, and contains at least one bond or functional group to be selected from an ether bond, a sulfide bond, an ester bond, an amino group, a phosphate group, a hydroxy group, a mercapto group, a carboxy group, a sulfo group, a quaternary ammonium group, a phosphonyl group (-PO<SB>2</SB>-), a phosphinyl group (-PO-), a sulfonyl group (-SO<SB>2</SB>-), and a sulfinyl group (-SO-), and an ion in the above film. COPYRIGHT: (C)2004,JPO |
