| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film gas sensor with little battery consumption and high reliability effectively heating only a gas sensing film with a heater. SOLUTION: The thin film gas sensor comprises an Si substrate 1 with a penetration hole, a diaphragm composed of at least a first insulation film 2 spread over the opening of this penetration hole, a thin film heater 3 on this diaphragm, a second insulation film 4 covering the heater 3, and the gas sensing film 6 composed of SnO<SB>2</SB>with sensing film electrodes 5 formed at both ends thereof. This heater 3 is composed of a heat generating part 3h overlapping with a gas sensing film area, a pad 3p for wire bonding arranged on an Si substrate area, and a lead 31 connecting both of them 3h, 3p. In the thin film gas sensor, the width of the lead is made larger than that of the heat generating part 3h. COPYRIGHT: (C)2004,JPO
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