| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact type probe capable of actively varying any force or contact force applied to the probe, removing vibration of mechanical resonance frequency generated by the probe weight and a spring for dead weight compensation under non-contact conditions, and reducing the probe weight as well as accurately detecting the initial position of the probe. SOLUTION: The contact type probe is equipped with an actuator allowing contact force for the probe to be generated or compensating the probe weight to generate certain contact force or certain force. COPYRIGHT: (C)2004,JPO
|
