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发明名称
POLISHING OF SEMICONDUCTOR SUBSTRATES
摘要
申请公布号
EP1352418(A2)
申请公布日期
2003.10.15
申请号
EP20020718822
申请日期
2002.01.09
申请人
RODEL HOLDINGS, INC.
发明人
LUO, QIULIANG;YE, QIANQIU;BLOCK, KELLY, H.
分类号
B24B37/00;C09G1/02;C09K3/14;H01L21/304;H01L21/321;(IPC1-7):H01L21/321
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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