| 发明名称 |
System and method for illuminating a semiconductor processing system |
| 摘要 |
The present invention relates to illuminating an interior portion of a processing chamber in a semiconductor processing system. A light emitting diode is located in the chamber to illuminate the interior of the chamber to facilitate viewing the interior of the chamber.</PTEXT>
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| 申请公布号 |
US6632283(B1) |
申请公布日期 |
2003.10.14 |
| 申请号 |
US20000591163 |
申请日期 |
2000.06.09 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
SINGH BHANWAR;RANGARAJAN BHARATH;PHAN KHOI A.;CHOO BRYAN K.;SUBRAMANIAN RAMKUMAR |
| 分类号 |
H01L21/00;(IPC1-7):B05C11/02 |
主分类号 |
H01L21/00 |
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