Silicon carbide cantilever paddle

摘要

A silicon carbide cantilever paddle for use in semiconductor wafer processing is disclosed. The cantilever paddle is characterized in that it exhibits acceptable deflection characteristics over the entire range of weight loads with which it may be used, and that it is compatible with existing clamp systems. This is achieved by providing a "two-stage" handle having a large diameter section and a small diameter section, the sections being separated by a handle transition zone.