| 摘要 |
<p>A gas laser which outputs a prescribed high power from the start of laser oscillation immediately after the laser gas is changed. The laser of which the used laser gas in a laser chamber (1) is replaced with a fresh laser gas is provided with a gas leaving means which leaves a prescribed amount of used gas in the fresh gas after gas replacement or an impurity gas adding means which adds a prescribed amount of impurity gas to the fresh gas, and a controller (11). It is preferable that the concentration of the used gas in the fresh gas is within the range of 1.5-60 %. The gas leaving means is a gas discharge control mechanism (10) which controls the exhausted amount of used gas so that a prescribed amount of used gas may be left in the fresh gas or a laser gas container (21) which mixes a prescribed amount of stored used gas into the fresh gas. The impurity gas adding means is a laser gas cylinder containing a prescribed concentration of impurity gas or an impurity gas container (44).</p> |
