| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head in which operational failure due to the external environment, e.g. moisture of a piezoelectric element, can be prevented while reducing the size, its producing method and a liquid ejector. <P>SOLUTION: The liquid ejection head comprises a channel forming substrate 10 in which pressure generating chambers 12 communicating with an nozzle opening 21 for ejecting liquid are defined, and a piezoelectric element 300 consisting of a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80 arranged on one side of the channel forming substrate 10 through a diaphragm. A sealing substrate 30 having a piezoelectric element holding part 32 for hermetically sealing a space ensured in a region facing the piezoelectric element 300 is provided on the surface of the channel forming substrate 10 on the piezoelectric element 300 side. The piezoelectric element holding part 32 of the sealing substrate 30 is bonded, at least partially at the circumferential edge part thereof, to the channel forming substrate 10 through a glass bonding layer 110 thus preventing intrusion of moisture into the piezoelectric element holding part 32. <P>COPYRIGHT: (C)2004,JPO |
