A SYSTEM AND METHOD FOR DETERMINING THE STATE OF A FILM IN A PLASMA REACTOR USING AN ELECTRICAL PROPERTY,申请号AU20030224727-传众专利搜索

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发明名称	A SYSTEM AND METHOD FOR DETERMINING THE STATE OF A FILM IN A PLASMA REACTOR USING AN ELECTRICAL PROPERTY
摘要
申请公布号	AU2003224727(A1)	申请公布日期	2003.10.13
申请号	AU20030224727	申请日期	2003.03.28
申请人	TOKYO ELECTRON LIMITED	发明人	JOHN DONOHUE
分类号	H01J37/32;(IPC1-7):H01L21/00;C23C16/00	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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