发明名称 PROCESS MANAGING DEVICE
摘要 <p>A process managing apparatus includes a fixed disk for storing a production-fluctuation process and a planned proportion of conforming items in a production process, a detection unit for detecting a process under progress and amount of work-in-progress items for each lot, and a CPU for calculating the amount of conforming items for each lot, based on the feed amount for each lot and another proportion different from the planned proportion of conforming items for a lot to be subjected to the production-fluctuation process, and based on the feed amount for each lot and the planned proportion of conforming items for a lot having been subjected to the production-fluctuation process, and then calculating an expected amount of conforming items by summing these amount of conforming items for each lot.</p>
申请公布号 KR20030079665(A) 申请公布日期 2003.10.10
申请号 KR20020080185 申请日期 2002.12.16
申请人 发明人
分类号 G05B19/418;G06F19/00;G06Q50/00;G06Q50/04;H01L21/02 主分类号 G05B19/418
代理机构 代理人
主权项
地址