| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the yield in manufacturing an optical waveguide device by substantially eliminating or reducing the electric discharge breakdown of optical waveguide patterns formed on a crystalline substrate having a pyroelectric effect. <P>SOLUTION: The method for manufacturing the optical waveguide device comprises forming a plurality of the optical waveguide patterns 5, etc., by a heat treatment in parallel on the lithium niobate substrate 2 having pyroelectricity and dividing such substrate individually to the prescribed form of chips. The optical waveguide patterns 5 are so formed as to be respectively conducted in the positions where both ends thereof deviate from the effective ranges of the chips. Further, dummy patterns 26, etc., are formed in the positions near the waveguide patterns 25, etc. <P>COPYRIGHT: (C)2004,JPO</p> |
