| 摘要 |
PURPOSE:To execute ceramics machining with high accuracy by relatively moving a laser beam set with irradiation energy and the fine ceramics in parallel to gouge a groove and bringing the ceramics closer in the irradiation direction by as much as the depth of the gouging and repeating the gouging. CONSTITUTION:The groove is gouged in the alumina ceramics by an alexandrite laser. the laser beam generated in a horizontal direction from a laser body 1 is changed in the direction to a perpendicular direction by a bending mirror 3. The surface of the work 10 (alumina ceramics) on an X-Y-Z table 8 is irradiated with the condensed light via a lens 4 by which the ceramics is machined. A side nozzle 7 blows gas, such as Ar, to the machining point in order to accelerate evaporation and to remove melt at the time of ceramics machining. The laser beam machining is executed under the prescribed conditions determined by preliminary experiments of a pulse mode, the energy per 1 pulse, the number of pulses per 1 second, the focal distance of the condensing lens, and the moving speed of the table. The ceramics machining is executed with the high machining accuracy without cracks in this way. |
