发明名称 |
Method and device for generating euv radiation |
摘要 |
The invention relates to a method for generating EUV radiation. Laser pulses are directed onto photoelectric transducer means (10), which generate pulses of electrically charged particles (6) as a result of the action of the laser pulses. The electrically charged particles are accelerated in an electric field and directed onto a target (4), in such a way that the target generates a plasma, which emits EUV radiation, as a result of the action of the electrically charged particles.
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申请公布号 |
US2003189176(A1) |
申请公布日期 |
2003.10.09 |
申请号 |
US20020276104 |
申请日期 |
2002.11.12 |
申请人 |
CHICHKOV BORIS;EGBERT ANDR?EACUTE, |
发明人 |
CHICHKOV BORIS;EGBERT ANDR?EACUTE, |
分类号 |
H05G2/00;(IPC1-7):H01J37/141;G01J1/00;G21G5/00 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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