| 摘要 |
<p>Provided is a system for transferring and delivering a liquid chemical from a source to an end use station, The system includes: (a) a pressure vessel connected to a liquid chemical source by a delivery conduit, the pressure vessel having an internal surface; (b) a non-mechanical means of transferring the liquid chemical from the source through the delivery conduit to the pressure vessel; (c) a flexible liquid metering device disposed within the pressure vessel, the metering device having an interior and an interior surface and an exterior and an exterior surface; (d) a space adapted to receive the liquid chemical, the space being defined by at least a portion of the metering device external surface and at least a portion of the pressure vessel interior surface, or by at least a portion of the metering device internal surface; and (e) a pressurized gas conduit connected to a pressurized gas source for delivering the pressurized gas into the pressure vessel so as to contact the other of the interior or exterior surface of the metering device that defmes the space, whereby the liquid chemical is forced out of the pressure vessel by the metering device to an end use station. Also provided is a method of transferring and delivering a liquid chemical from a source to an end use station. The invention has particular applicability to the semiconductor manufacturing industry for the distribution of ultrapure liquid chemicals to end use stations.</p> |
