发明名称 |
Wafer handling system |
摘要 |
A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.
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申请公布号 |
US2003188447(A1) |
申请公布日期 |
2003.10.09 |
申请号 |
US20030397946 |
申请日期 |
2003.03.25 |
申请人 |
SEMITOOL, INC. |
发明人 |
NELSON GORDON R.;DAVIS JEFFRY A.;THOMPSON RAYMON F.;BERGMAN ERIC J. |
分类号 |
H01L21/677;H01L21/687;(IPC1-7):F26B17/24 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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