PARTING METHOD FOR FRAGILE MATERIAL SUBSTRATE AND PARTING DEVICE USING THE METHOD

摘要

A parting method for a fragile material substrate and a parting device using the method, the parting method comprising a scribe step for scribing the fragile material substrate in such a state that a protective member is applied onto one surface of the substrate; the parting device comprising a first scribing device for performing the scribe step, whereby cullet produced when the substrate is parted can be effectively removed, and the substrate can be accurately parted along a scribe line by forming a vertical crack extending deep into the substrate.