发明名称 |
SOLAR CELL AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A solar cell has a monocrystalline or polycrystalline silicon layer (11) and a silicon layer (12) containing carbon. The silicon layer (12) containing carbon is formed on the monocrystalline or polycrystalline silicon layer (11) by hot-wire CVD. The silicon layer (12) containing carbon has a fine crystalline silicon column (12b) therein. The silicon layer (12) containing carbon has a high conductivity. The silicon layer (12) containing carbon has a high hydrogen concentration layer (12a) at an interface with the monocrystalline or polycrystalline silicon layer (11).
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申请公布号 |
WO03083953(A1) |
申请公布日期 |
2003.10.09 |
申请号 |
WO2003JP02474 |
申请日期 |
2003.03.04 |
申请人 |
EBARA CORPORATION;MISHIMA, TAKAHIRO;ISHIKAWA, NAOKI |
发明人 |
MISHIMA, TAKAHIRO;ISHIKAWA, NAOKI |
分类号 |
H01L31/04;C23C16/24;C23C16/44;H01L21/205;H01L31/072;H01L31/18;(IPC1-7):H01L31/042 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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