发明名称 SOLAR CELL AND METHOD OF MANUFACTURING THE SAME
摘要 A solar cell has a monocrystalline or polycrystalline silicon layer (11) and a silicon layer (12) containing carbon. The silicon layer (12) containing carbon is formed on the monocrystalline or polycrystalline silicon layer (11) by hot-wire CVD. The silicon layer (12) containing carbon has a fine crystalline silicon column (12b) therein. The silicon layer (12) containing carbon has a high conductivity. The silicon layer (12) containing carbon has a high hydrogen concentration layer (12a) at an interface with the monocrystalline or polycrystalline silicon layer (11).
申请公布号 WO03083953(A1) 申请公布日期 2003.10.09
申请号 WO2003JP02474 申请日期 2003.03.04
申请人 EBARA CORPORATION;MISHIMA, TAKAHIRO;ISHIKAWA, NAOKI 发明人 MISHIMA, TAKAHIRO;ISHIKAWA, NAOKI
分类号 H01L31/04;C23C16/24;C23C16/44;H01L21/205;H01L31/072;H01L31/18;(IPC1-7):H01L31/042 主分类号 H01L31/04
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