发明名称 |
Functional water, method and apparatus of producing the same, and method and apparatus of rinsing electronic parts therewith |
摘要 |
A functional water containing a fluorine-containing component obtained by electrolyzing an aqueous solution containing fluoride ion using electrodes having conductive diamonds, a method of producing the same, and a method and an apparatus of rinsing electronic parts using the functional water as a rinsing water. The fluorine-containing component produced by electrolyzing the fluoride ion using the conductive diamond, has stronger rinsing effect than that of a fluorine-containing component obtained by electrolyzing the fluoride ion itself before electrolysis or the fluoride ion using other electrodes. Therefore, an amount of hydrofluoric acid used can greatly be decreased.
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申请公布号 |
US2003188764(A1) |
申请公布日期 |
2003.10.09 |
申请号 |
US20030402990 |
申请日期 |
2003.04.01 |
申请人 |
PERMELEC ELECTRODE LTD.;PURETRON LTD. |
发明人 |
HAIBARA TERUO;UEMURA KENICHI;KATO MASAAKI;YAMADA KUNIAKI;NISHIKI YOSHINORI;FURUTA TSUNETO |
分类号 |
C02F1/20;C02F1/461;(IPC1-7):C23G1/00 |
主分类号 |
C02F1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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