发明名称 Manipulator for an optical or particle/optical device
摘要 Manipulator for an optical or particle-type optical device. The invention relates particularly to a shutter or sample manipulator for an electron microscope, whereby the component (4) to be manipulated is held in a moveable transfer body (2) so that it can be moved relative to a fixed component (1). The transfer body is made of thermally anisotropic compound material with the direction of the higher thermal conductivity being along the axis linking manipulated and fixed components. The invention also relates to a corresponding electron microscope.
申请公布号 EP1351271(A1) 申请公布日期 2003.10.08
申请号 EP20030002448 申请日期 2003.02.05
申请人 LEO ELEKTRONENMIKROSKOPIE GMBH 发明人 MUELLER, HELMUT;TOBIAS, DANIEL
分类号 H01J37/09;H01J37/20;H01J37/26;(IPC1-7):H01J37/20;G02B21/32 主分类号 H01J37/09
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