| 摘要 |
PURPOSE: A cryo pump for manufacturing a semiconductor device is provided to be capable of breaking contaminated gas from being re-flowed into the cryo pump and uniformly supplying purge gas by using a ring type purge guide. CONSTITUTION: A cryo pump(200) is provided with a pump case(210) installed with an air exhaust pipe, an inner barrel(220) having a purge gas inflow port(222), installed in the pump case, a gas condensation part installed at the inner barrel for condensing and adsorbing gas molecules, a cooling unit(230) for cooling the gas condensation part to a cryogenic state, and a recycling part for removing the condensed gas molecules by supplying purge gas(70) to the purge gas inflow port. At this time, the recycling part includes a purge gas supply unit(282) for supplying the purge gas, a purge gas supply pipe(284) connected with the purge gas supply unit for flowing the purge gas, and a purge gas nozzle unit. Preferably, a purge guide(226) is installed at the bottom portion of the inner barrel for uniformly flowing the purge gas into the inner barrel.
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