| 摘要 |
PROBLEM TO BE SOLVED: To safely, quickly and simply perform initializing operation at a start and a return from a trouble, in aerosol cleaning equipment and reduce the load of an operator. SOLUTION: Corresponding to positions of robot hands 86, 87 which are decided on the basis of a slot in which the robot hands are inserted and which is defined by heights of the robot hands 86, 87 and the elevating position of a cassette 70, and on the basis of the output of an encoder for detecting a telescopic position and rotating and/or an elevating positions of the robot hands, wafers 10 on the way of delivery between the cassette and the robot hands are accommodated in the cassette, and waters on the way of deliver in buffer chambers 90, 91 are mounted on the robot hands. After the robot hands are moved, process hands 46, 47 and cassette elevators 74, 75 are moved to initial positions, the presence of wafers is decided on the basis of wafer detecting sensors 100, 102, 103. Corresponding to whether wafers are present at the respective positions, the wafer is accommodated in the cassette, and gate valves 76, 77, 92 and 93, a valve for pressure equalization and apparatus are set in their initial states. COPYRIGHT: (C)2004,JPO |
