| 摘要 |
PROBLEM TO BE SOLVED: To provide a circuit board which can obtain superior exposure characteristic and an aligner equipped with the circuit board. SOLUTION: In the printed board 50 on which signal lines 52a, 53a, a ground line 52b and a current voltage conversion amplifier 51 connected with the signal lines 52a, 53a and the ground line 52b are mounted, mesh type ground patterns 54a, 54b are arranged putting the signal lines 52a, 53a between the patterns. COPYRIGHT: (C)2004,JPO
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