| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic holding device that prevents instantaneous electric potential induced on a rear surface of an object to be held, and a transport device using it. SOLUTION: This electrostatic holding device holds the object with an electrostatic force by controlling a voltage applied to an electrode. This electrode consists of one or a plurality of pairs of electrodes 103a and 103b. A lot of the electrodes 103a and 103b are adjacently arrayed with fine pitches of insulating regions 102c. A control device 106 applies voltages of reverse polarities to each other to the electrodes 103a and 103b. By applying the reverse polarities from the control device 106 to the electrodes 103a and 103b, the object 104 to be held is held. COPYRIGHT: (C)2004,JPO |
