发明名称 |
Method of defect repairing in graytone part in graytone mask |
摘要 |
Repairing patterns 3a' and 3b' different in width and position respectively from regular patterns 3a and 3b by partially removing a repairing film 8 in the form and/or the disposition of achieving a graytone effect equal to the graytone effect of a regular pattern after forming the repairing film 8 in an area containing clear defects.
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申请公布号 |
US2003186130(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20020107817 |
申请日期 |
2002.03.28 |
申请人 |
HOYA CORPORATION |
发明人 |
NAKAYAMA KENJI |
分类号 |
G03F1/00;G03F1/14;(IPC1-7):G03F1/00;G02F1/01;G02B26/00;G03B21/56;G03F7/16;G03F7/26 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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