LASER ABLATION METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser ablation method and device that can surely collect micro-grains as well as removing coarse grains. SOLUTION: A first rotary plate 6 is rotatably driven which is arranged opposite to a substrate S for collecting grains and which is provided with a slit 6a for allowing grains to pass, while a pulsed laser beam is generated from a laser beam source 2 in synchronization with the rotation of the first rotary plate 6. The target 5 arranged on the side opposite from the substrate S with the first rotary plate in-between is irradiated by the laser beam and made to release the grains. With the slit 6a of the first rotary plate 6 traversing a grain release route from the target 5 to the substrate S, the released grains in a prescribed speed range are passed through the slit 6a, so that the released grains are selectively collected with the substrate S. COPYRIGHT: (C)2004,JPO