发明名称 FABRICATION OF A MICROCHANNEL PLATE FROM A PERFORATED SILICON WORKPIECE
摘要 <p>Manufacture of a microchannel plate may be improved using photoelectrochemical etching and thin film activation such as CVD and nitriding and oxidizing wall surface portions (28) of pores (12) formed in the substrate (10). The pore pattern may be changed by oxidizing and etching the substrate prior to activation.</p>
申请公布号 WO1997004969(A1) 申请公布日期 1997.02.13
申请号 US1996012209 申请日期 1996.07.25
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