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发明名称
ION SOURCE
摘要
申请公布号
EP1348228(A1)
申请公布日期
2003.10.01
申请号
EP20010998988
申请日期
2001.11.29
申请人
SAINTECH PTY. LTD
发明人
SAINTY, WAYNE, G.
分类号
H05H1/24;C23C14/22;C23C14/32;C23C14/54;H01J27/08;H01J37/04;H01J37/08;H01J37/317;(IPC1-7):H01J37/317;H01J27/02
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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