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发明名称
LIGHT IRRADIATION APPARATUS
摘要
申请公布号
KR20030077388(A)
申请公布日期
2003.10.01
申请号
KR20030017787
申请日期
2003.03.21
申请人
发明人
分类号
G02B26/00;G02B26/02;G02B27/18;G03F7/20;H01L21/027
主分类号
G02B26/00
代理机构
代理人
主权项
地址
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