发明名称 INSTALLATION WHEREIN IS PERFORMED AN OPERATION REQUIRING CONTROL OF ATMOSPHERE INSIDE A CHAMBER
摘要 <p>Optimization of an installation in which an operation is performed that requires control over the atmosphere inside a chamber (3), the operation being performed in the presence of a gaseous mixture capable of giving off emissions, the optimization being obtained by the presence of inlet (5) and outlet (8) devices external to the chamber to oppose the ingress of air into the chamber and the exit of gaseous emissions; and of an extraction device (4) comprising means (42) for regulating the flow rate to maintain an approximately zero pressure differential between the inside and the outside of the chamber.</p>
申请公布号 EP1348039(A2) 申请公布日期 2003.10.01
申请号 EP20010996636 申请日期 2001.11.06
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;SOFTAL ELECTRONIC ERIK BLUMENFELD GMBH & CO. 发明人 COCOLIOS, PANAYOTIS;COEURET, FRANCOIS;DOERING, WOLFGANG;FOERSTER, FRANCK;GELOT, JEAN-LOUIS;MARTENS, BERND;MELEN, STEPHANE;PRINZ, ECKARD;THONNELIER, JEAN-YVES;VILLERMET, ALAIN
分类号 C23C16/44;C23C16/455;C23C16/54;G05D7/06;(IPC1-7):C23C16/44 主分类号 C23C16/44
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