发明名称 |
Method for aligning two objects |
摘要 |
A system for aligning a mask and a product with high precision, featuring a means for supporting a product in a fixed position and a mask adjacent to the product so that the mask is movable relative to the product. A plurality of computer controlled plungers push the surrounding mask frame into alignment. A computer is used to determine the relative position of the mask and the product prior to alignment; and that, to achieve proper alignment of the mask and the product, and determines the distance that the mask must be moved.
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申请公布号 |
US6628391(B2) |
申请公布日期 |
2003.09.30 |
申请号 |
US20010852318 |
申请日期 |
2001.05.11 |
申请人 |
HOOVER REX;HOOVER ROBERT G.;HOOVER THOMAS A. |
发明人 |
HOOVER REX;HOOVER ROBERT G.;HOOVER THOMAS A. |
分类号 |
G02B7/16;G02B21/24;G02B21/36;G03F7/20;G03F9/00;(IPC1-7):G01B11/00;G03B27/62;G03B27/42 |
主分类号 |
G02B7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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