Wafer-less qualification of a processing tool

摘要

A metbod for perforning a wafer-less qualification of a processing tool includes creating a wafer-less qualification model for the processing tool. Qualification data is generated from the processing tool iiiring a wafer-less qualification process. The qualification data is compared with the wafer-less qualification model. The processig tool is determined to be operating in a predefined state based on the comparison of the qualification data with the wafer-less qualification model.