发明名称 Infrared detector packaged with improved antireflection element
摘要 An infrared detector has a window in a cover having a cavity for exposing detector pixels to incident radiation. The window has an antireflective element formed within the cavity as a field of posts. The field of post structures is formed in a cavity by etching the posts in a desired pattern first, and forming the cavity by a general etch over the whole field afterward.
申请公布号 US6627892(B2) 申请公布日期 2003.09.30
申请号 US20000751611 申请日期 2000.12.29
申请人 发明人
分类号 G01J1/02;H01L27/146;(IPC1-7):H01L23/02;G01T5/08 主分类号 G01J1/02
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