发明名称 |
Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus |
摘要 |
Of spontaneous emission beams emitted from a laser medium but not line-narrowed, a spontaneous emission beam whose wavelength approximates a narrowed emission beam and whose light intensity is equal to or higher than a certain level is used as a reference light.
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申请公布号 |
US6628682(B1) |
申请公布日期 |
2003.09.30 |
申请号 |
US20000716411 |
申请日期 |
2000.11.21 |
申请人 |
KOMATSU LTD. |
发明人 |
TAKEHISA KIWAMU;SHIO KOUJI;NAGAI SHINJI;IWATA YASUAKI;WAKABAYASHI OSAMU |
分类号 |
H01S3/137;H01S3/139;H01S3/225;(IPC1-7):H01S3/13 |
主分类号 |
H01S3/137 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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