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发明名称
MICRO-ELECTROMECHANICAL SYSTEMS
摘要
申请公布号
AU2003226833(A1)
申请公布日期
2003.09.29
申请号
AU20030226833
申请日期
2003.03.19
申请人
QINETIQ LIMITED
发明人
DAVID, JAMES HAMILTON;MARK, EDWARD MCNIE;KEVIN, MICHAEL BRUNSON;ROBERT, JOHN, TREMAYNE BUNYAN
分类号
B81C1/00;B81B7/02;H01L21/337;H01L27/095;H01L29/808;(IPC1-7):B81B7/02
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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