HIGH-FREQUENCY QUARTZ VIBRATOR AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A high-frequency quartz vibrator and a fabricating method thereof are provided to enhance the electrical and the mechanical reliability by dividing a quartz vibrator into a protection region and an oscillation region. CONSTITUTION: A fine polishing process is performed to polish finely a quartz section(102). A ring deposition process is performed to use selectively an etching region and a non-etching region of the quartz section(103). A nickel plating process is performed to plate nickel on the quartz section on which a ring is deposited(104). The nickel-plated quartz section is etched under the temperature of 178 to 182 degrees centigrade by using the etching solution of alkali chemicals and the deionized water(105). The ring is removed from a metal layer deposited on the non-etching region of the etched quartz section(106).