| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of easily manufacturing a stamper while keeping flatness of a stamper substrate high. SOLUTION: The method includes: a step of coating a photo resist 103 on the surface of a stamper substrate 102; a step of exposing and developing the photo resist film 103 formed on the stamper substrate 102 to form a mask 106 on the surface of the stamper substrate; and a step of forming a rugged information pattern on the surface of the stamper substrate 102 by using the mask 106 to etch the stamper substrate 102, and the rear side of the stamper substrate 102 is adhered and fixed to the support substrate 101 via a thermo exfoliation adhesive 112 in at least the step of forming the mask. COPYRIGHT: (C)2003,JPO
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