FLUORINE-CONTAINING POLYMERIZABLE MONOMERS AND POLYMERS, ANTI-REFLECTION FILM MATERIALS AND RESIST COMPOSITIONS USING SAME

摘要

The present invention relates to a fluorine-containing polymerizable monomer having a structure of the general formula (1), where each of R₁ and R₂ is independently a methyl group or trifluoromethyl group, and each of R₃ and R₄ is independently a hydrogen atom, an alkyl group, a fluorinated alkyl group, a ring structure having an aromatic ring, or an acid-labile protecting group, each of the alkyl group and the fluorinated alkyl group independently having a straight-chain, branched or ring form and having a carbon atom number of 1-25, each of R₃ and R₄ optionally and independently containing at least one of an oxygen atom and a carbonyl bond.