MICROWAVE PLASMA GENERATING APPARATUS, METHOD FOR DECOMPOSING OR GANIC HALIDE, AND SYSTEM FOR DECOMPOSING ORGANIC HALIDE

摘要

A discharge tube (11) of a dielectric material extends through an opening (3) of a rectangular waveguide (1) and through a coaxial microwave cavity (4) coaxially with the center axis. The discharge tube (11) has a double-tube structure including an outer tube (12) and an inner tube (13). The sectional area of the annular gap between the outer tube (12) and the inner tube (13) is constant over the full length of the inner tube (13). Therefore, a stable thermal plasma can be generated when the inside of the outer tube is fed through the annular gap with a reactive gas such as a gas containing an organic halide and water vapor while microwaves are being transmitted from the rectangular waveguide (1) into the cavity (4).