发明名称 |
INTEGRATED LASER OSCILLATOR-AMPLIFIER SYSTEM |
摘要 |
The present invention contemplates an integrated oscillator-amplifier system for deep UV generation. The system employs a long cavity oscillator to lengthen the pulse build-up time and to control the pulse spectral bandwidth. Meanwhile the system employs a short cavity amplifier to shorten the energy extraction time to produce a single short pulse with good energy extraction efficiency. The system further integrates the oscillator and the amplifier by inserting the amplifier cavity inside the oscillator cavity via a mirror of low reflectivity. As a result, the integrated system has a long build-up time to generate a seed pulse in the long cavity oscillator and has a short energy extraction time to generate a short amplified single pulse in the short cavity. Consequently, the integrated system can accommodate a relatively long pump pulse to produce a single short amplified pulse suitable for deep UV laser generation. |
申请公布号 |
WO03079505(A2) |
申请公布日期 |
2003.09.25 |
申请号 |
WO2003US07459 |
申请日期 |
2003.03.10 |
申请人 |
MING LAI, SALIA;QU, ZHIMIN;MOHEBI, MEHRDAD |
发明人 |
MING LAI, SALIA;QU, ZHIMIN;MOHEBI, MEHRDAD |
分类号 |
H01S3/00;H01S3/05;H01S3/082;H01S3/102;H01S3/23 |
主分类号 |
H01S3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|