| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for inspecting conductor for an integrated circuit. <P>SOLUTION: This inspection device includes a base 40 and an inspection cover 50. A recessed article mounting groove 41 is provided on the upper end face of the base 40, a support reinforcement 42 is provided in the groove 41, and article mounting protruded edges 43 of a slightly high height are provided on the both sides of the groove 41. Frame beams 52 are provided respectively in both sides of both side blocks 51 in the inspection cover 50, the both side blocks 51 and the both frame reinforcements 42 form a frame body, and a corresponding beam 53 is provided between the both side blocks 51. The beam 53 partitions the frame body into a few of inspection areas 54, and the each inspection area 54 is used for mounting of an inspecting piece 55. Both sides of the inspecting piece 55 are stayed in end faces of the both side blocks 51, and the inspecting piece 55 is allowed to move in the end faces of the both side blocks 51. Corresponding protruded edges are provided in bottom edges of the both frame beams 52 and the corresponding beams 53 in the inspection cover 50, and the corresponding protruded edges correspond respectively to the article mounting protruded edges 43 and the support reinforcement 42 in the base 40. <P>COPYRIGHT: (C)2003,JPO |
